Electronic Materials
Etching agent (C5F8)
Characteristics
Semiconductors (Memory/LSI)
- Wide process margin
- High etch rate and selectivity
- Well balanced atmospheric lifetime and minimal global warming potential
Physical Properties
| ZEORORA® ZFL-58 (C5F8) | |
| Boiling Point (℃) | 27 |
| Specific Gravity (25℃) | 1.5800 |
| Viscosity (Pa･s) | 0.0038 |
| Surface Tention (mN/m) | 17.8 |
| Specific Heat (J/(kg･K)) | 1160 |
| Latent Heat of Vaporization (kJ/kg) | 118 |
| Critical Temperature (℃) | 159.9 |
| Critical Pressure (MPa) | 2.47 |
| Flash Point (℃) | No flash point |
| Explosive Propeties | Non-explosive |
| Flammability | Non-Flammable |
| Solubility for Water (g/100g water) | 0.00756 |
| Solubility of Water(g/100g solvent) | 0.0072 |
| Atmospheric Lifetime (year) | 0.98 |
| GWP (CO2=1 100 years) | 90 |
- *ZEORORA® was developed in partnership with the National Institute of Materials and Chemical Research in a joint research project.
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