Electronic Materials
Photoresists
ZPN lift off resist has a wide and stable controllability of reverse taper, resolution and stripping.
Characteristics and resist shape
Lift-off process
Easily obtain anti-taper shape in only one exposure process
Resist shape of ZPN1150
· Easy control of taper angle
· Wide process margin
· Good stripping
· Good heat resistance
| Characteristics | ZPN1150 |
|---|---|
| taper angle | > 60° |
| heat resistance | 100℃ |
| stripping | MEA/DMSO=70/30 mixed solution |
- Lift-off resist for wiring patterns of LED chip
- Lift-off resist for wiring patterns of electronic devices using compound semiconductors
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