Electronic Materials

Photoresists

ZPN lift off resist has a wide and stable controllability of reverse taper, resolution and stripping.

Characteristics and resist shape

Lift-off process

Easily obtain anti-taper shape in only one exposure process

Resist shape of ZPN1150

· Easy control of taper angle
· Wide process margin
· Good stripping
· Good heat resistance

Characteristics ZPN1150
taper angle > 60°
heat resistance 100℃
stripping MEA/DMSO=70/30 mixed solution
  • Lift-off resist for wiring patterns of LED chip
  • Lift-off resist for wiring patterns of electronic devices using compound semiconductors
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