Electronic Materials
Etching agent (C5F8)
Characteristics
- Wide process margin
- High etch rate and selectivity
- Well balanced atmospheric lifetime and minimal global warming potential
Physical Properties
ZEORORA® ZFL-58 (C5F8) | |
Boiling Point (℃) | 27 |
Specific Gravity (25℃) | 1.5800 |
Viscosity (Pa・s) | 0.0038 |
Surface Tention (mN/m) | 17.8 |
Specific Heat (J/(kg・K)) | 1160 |
Latent Heat of Vaporization (kJ/kg) | 118 |
Critical Temperature (℃) | 159.9 |
Critical Pressure (MPa) | 2.47 |
Flash Point (℃) | No flash point |
Explosive Propeties | Non-explosive |
Flammability | Non-Flammable |
Solubility for Water (g/100g water) | 0.00756 |
Solubility of Water(g/100g solvent) | 0.0072 |
Atmospheric Lifetime (year) | 0.98 |
GWP (CO2=1 100 years) | 90 |
- *ZEORORA® was developed in partnership with the National Institute of Materials and Chemical Research in a joint research project.
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