Electronic Materials

Coating Insulation Materials

ZEOCOAT; Coating Type Insulation Materials for Display

Characteristics

High Transparency
High Transparency
Low Water Absorption
Low Water Absorption
Low Dielectric Constant
Low Dielectric Constant
Higher Heat Resistance
Higher Heat Resistance

ZEOCOAT® ZC100: Alkaline - developable positive - type photosensitive insulation material

Characteristics

Dielectric constant
Dielectric constant
Resolution
Resolution

<Condition>
ZC100 Film Thickness : 10 um
Prebake : 120 deg. C, 2 min.
Exposure : g - Line Stepper, No defocus, 900mJ/cm2
Development : 2.38%TMAH, 23 deg. C, 90 sec.
Cure : 180 deg. C

Planarization
Planarization

DOP: Degree of Planarization
A prefect planarization has a DOP of 1.0.

Reliability
Reliability

<Test Condition>
Film Thickness : 5um
Comb Cu Electrode L / S = 2 um / 2 um

Series / Product number

ZEOCOAT; Coating Type Insulation Materials for Display

ZEOCOAT
ES2110-10
ZEOCOAT
CP1010-14
ZEOCOAT
CP4110-4
Photosensitivity Non Photosensitive Photosensitive Positive Tone Photosensitive Positive Tone
Viscosity (cP) 10 14 5
Coating Thickness (um) ~2 ~2 ~2/Slit
Prebaking 90deg.C, 120s 110deg.C, 120s 90deg.C, 90s
Development - 2.38%TMAH, 40s 0.4%TMAH, 60s
Cure 230deg.C, 60min, N2 230deg.C, 60min, N2 230deg.C, 60min, N2
Transparency
(%@400nm, 2um)
99 97 92
Water Absorption
(ppm)
60 190 180
Dielectric Constant
(@1MHz)
3.3 3.4 3.4
5% Weight Loss Temp.
(deg.C, under N2)
350 340 350
CTE
(ppm/K)
52 57 57
Curing Shrinkage
(%)
2 1 5
Breakdown Voltage
(MV/cm)
6.9 7.4 7.5
Leak Current
(A@2MV/cm)
1.4E-10 4.3E-11 3.3E-11

ZEOCOAT® ZC100: Alkaline - developable positive - type photosensitive insulation material

ZC100
Photosensitive Type (Positive)
Curing Temp. 180 200 230
Physical
Properties
Young's Modulus
[GPa]
2.7 2.5 2.4
CTE x-y (<Tg)
[ppm/K]
56 54 52
Curing Shrinkage
[%]
4.5 5.3 6.7
5% Weight Loss Temp.
[℃]
334 342 348
Tg (TMA)
[℃]
192 215 219
Mechanical
Properties
Tensile Strength
[MPa]
100 100 100
Elongation
[%]
10 12 13
Electrical
Properties
Dielectric Constant
(@ 10 GHz)
2.8 2.8 2.8
Dielectric Breakdown Strength
[kV / mm]
> 300 > 300 > 300
Surface Resistivity
[Ω]
> 8×1015 > 8×1015 > 8×1015
Volume Resistivity
[Ω · cm]
> 3×1016 > 3×1016 > 3×1016
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