信息材料

涂布型绝缘材料

ZEOCOAT ™ ; 显示器用涂布型绝缘膜、保护膜

特性

高光透過性
高透光性

最适合用于显示器与光学零部件。

低吸水性
低吸水性

可以保护电子机器因水分而导致的损坏。

低誘電率
低电容率

有助于设备的低耗电化和低噪声化。

高耐熱性
高耐热性

可以拓宽工艺宽容度(Process Margin)。

碱性显影性的正型感光性绝缘材料:ZEOCOAT®ZC100

特性

誘電率
电容率
解像性
分辨率

<Condition>
ZC100 Film Thickness : 10 um
Prebake : 120 deg. C, 2 min.
Exposure : g‐Line Stepper, No defocus, 900mJ/cm2
Development : 2.38%TMAH, 23 deg. C, 90 sec.
Cure : 180 deg. C

平坦性
平坦性

DOP: Degree of Planarization
A prefect planarization has a DOP of 1.0.

信頼性試験
可靠性试验

<Test Condition>
Film Thickness : 5um
Comb Cu Electrode L / S = 2 um / 2 um

产品阵容

ZEOCOAT ™ ; 显示器用涂布型绝缘膜、保护膜

ZEOCOAT ™ ES2110-10 ZEOCOAT ™ CP1010-14 ZEOCOAT ™ CP4110-4
Photosensitivity Non
Photosensitive
Photosensitive
Positive Tone
Photosensitive
Positive Tone
Viscosity(cP) 10 14 5
Coating Thickness(um) ~2 ~2 ~2/Slit
Prebaking 90deg.C, 120s 110deg.C, 120s 90deg.C, 90s
Development - 2.38%TMAH, 40s 0.4%TMAH, 60s
Cure 230deg.C, 60min, N2 230deg.C, 60min, N2 230deg.C, 60min, N2
Transparency
(%@400nm, 2um)
99 97 92
Water Absorption
(ppm)
60 190 180
Dielectric Constant
(@1MHz)
3.3 3.4 3.4
5% Weight Loss Temp.
(deg.C, under N2)
350 340 350
CTE
(ppm/K)
52 57 57
Curing Shrinkage
(%)
2 1 5
Breakdown Voltage
(MV/cm)
6.9 7.4 7.5
Leak Current
(A@2MV/cm)
1.4E-10 4.3E-11 3.3E-11

碱性显影性的正型感光性绝缘材料:ZEOCOAT®ZC100

ZC100
Photosensitive Type(Positive)
Curing Temp. 180 200 230
Physical
Properties
Young's Modulus
[GPa]
2.7 2.5 2.4
CTE x-y(<Tg)
[ppm/K]
56 54 52
Curing Shrinkage
[%]
4.5 5.3 6.7
5% Weight Loss Temp.
[℃]
334 342 348
Tg(TMA)
[℃]
192 215 219
Mechanical
Properties
Tensile Strength
[MPa]
100 100 100
Elongation
[%]
10 12 13
Electrical
Properties
Dielectric Constant
(@ 10 GHz)
2.8 2.8 2.8
Dielectric Breakdown Strength
[kV / mm]
> 300 > 300 > 300
Surface Resistivity
[Ω]
> 8×1015 > 8×1015 > 8×1015
Volume Resistivity
[Ω・cm]
> 3×1016 > 3×1016 > 3×1016
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