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High Performance Positive EB Resist:ZEP520A seriesPrint Page

Characteristics

ZEP520A is high performance positive EB resist which shows high resolution and good dry etch resistance.

EB resist product lineup

  • EB resist product lineup

Developer product lineup

  • Developer product lineup


High resolution

ZEP520A can resolve L/S=30nm/30nm(FT=50nm).
Developer:ZED-N50

High resolution

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Home> Products> Product categories> Electronics, Telecommunications> Semiconductors> Resist> High Performance Positive EB Resist:ZEP520A series
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