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High Performance Positive EB Resist:ZEP520A seriesPrint Page

Characteristics

ZEP520A is high performance positive EB resist which shows high resolution and good dry etch resistance.

EB resist product lineup

  • EB resist product lineup

Developer product lineup

  • Developer product lineup


Spin Curve

Spin Curve

High resolution

ZEP520A can resolve L/S=25nm/25nm(FT=50nm).
Developer:ZED-N50
Evaluation sample:ZEP 520 A-7 was diluted 2.1 times with anisole.


ZEP520A高解像性(2)

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