ZEORORA® ZFL-58 (C5F8) Dry Etching Gas

ZFL-58 is an environmentally friendly new etching gas.

Features

	High etch rate
	High selectivity
	Ozone depletion potential is 0
	Short atmospheric lifetime and minimal global-warming potential
	Dry etching agent

Comparison of gas chemistry (C4F8 vs. C5F8)


Comparison of contact profile using three kinds of gases after etching


Etching Example

Properties

	ZEORORA ZFL-58 (C5F8)
Boiling point (°C)	27
Relative density (kg/m3)	1580
Viscosity (Pa•s)	0.0038
Surface tension (mN/m)	17.8
Specific heat (J/(kg•K))	1160
Latent heat of vaporization (kJ/kg)	118
Critical temperature (°C)	159.9
Critical pressure (MPa)	2.47
Flash point (°C)	No flash point
Explosive properties	Non-explosive
Auto-ignition point	–
Solubility for water (g/100g water)	0.00756
Solubility of water (g/100g solvent)	0.0072
Atmospheric lifetime (year)	0.98
ODP (CFC-11=1)	0
GWP (CO2=1 100 years)	90

This work has been conducted as joint research with the National Institute of Materials and Chemical Research.