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ZEORORA^® ZFL-58 (C5F8) is our environment-friendly etching gas.

ZEORORA^®ZFL-58 (C5F8) is our environment-friendly etching gas.
(For more details, please see the Product Information page)

We have received the following awards.

Year	Award issuing organization	Award name and technology
1998	Environmental Protection Agency (U.S.A.)	Stratospheric Ozone Protection Award (October 27)
2000	Japan Chemical Industry Association	Environment Technology Award "Development and manufacturing of environmentally friendly fluorinated materials." (May 25)
2000	Tsukuba Foundation for Chemical and Bio-Technology	The 8th Award "Development and evaluation of cyclic fluorinated compounds as environmentally safe materials." (May 29)
2003	Green & Sustainable Chemistry Network, Japan	The 2nd GSC Prize Minister of Environment Prize "The Development of the Manufacturing Technology of New Environment-friendly Five-ring Fluorine Compounds" (March)


Stratospheric Ozone Protection Award	Environment Technology Award of Japan Chemical Industry Association