Electron beam resist
A wide selection for a variety of needs, including photomasks,
EB direct drawing, thin film magnetic heads, and compound
semiconductors, as well as research and development.
| Product name | Properties | Applications |
| ZEP520A ZEP520A-7 |
Positive tone, Solvent developable, High dry etching resistance | R&D, GMR head, etc. |
| ZEP7000 | Positive tone, Solvent developable, High dry etching resistance | Photo mask, X-ray mask, R&D, etc. |
Thinner for electron beam resist
Solvent to adjust the viscosity of ZEON’s electron
beam resist
| Product name | Properties | Applications |
| ZEP-A | For ZEP520A | Thinner, Cleaner |
| ZEP-D | For ZEP7000 | Thinner, Cleaner |
| ZMPA | For TFT resist | Thinner |
Developer and rinse for electron beam resist
Developers and rinse for ZEON's electron beam resist
| Product name | Properties | Applications |
| ZEP-RD | High resolution | Developer for ZEP520A |
| ZED-N50 | High resolution, High γ value | Developer for ZEP520A |
| ZED-500 | High resolution | Developer for ZEP7000 |
| ZED-750 | High resolution, High residual thickness | Developer for ZEP7000 |
| ZMD-D | Rinse for ZEP7000 |
ZEONREX® : LCD photoresist
Resist for LCD displays
| Product name | Properties | Applications |
| ZPP1850 | Ultra-high sensitivity, High adhesion | TFT |
| ZPP1900 | Ultra-high sensitivity, For slit and spin coating | TFT |
| ZPP2400 | Ultra-high sensitivity, For spinless coating | TFT |
Separator and insulator for EL display
Organic EL display material
| Product name | Properties | Applications |
| ZPN2464 | Under cut pattern profile, Good thermal stability, Low degas level | Cathode Electrode for EL device |
| ZWD6216 | Alkaline development, Good organic solvent resistance, Low degas level | Insulator for EL device |
Photoresist developer
Solvent for photoresist developing, also compatible
for LCD resist
| Product name | Properties | Applications |
| ZTMA100-5L | Alkaline developer, TMAH 2.38% | Photoresist, etc. |
| ZTMA-U20 | Alkaline developer, TMAH 20% | Photoresist, etc. |
Adhesive promoter
Adhesive promoter for photoresists of
semiconductor, LCD
| Product name | Properties | Applications |
| ZHMDS100 | High adhesion for photoresist | Photoresist, etc. |
Cleaner
Back rinse and edge-bead remover and can be used for
cleaning of resist coating equipment
| Product name | Properties | Applications |
| ZS-50 | Safe, High performance | Semiconductors |
| ZDMAC | High cleansing ability | Semiconductors |
Etching agent (C5F8)
Next-generation etching agent friendly to the global
environment
| Product name | Properties | Applications |
| ZEORORA® ZFL-58 |
High selectivity, Environmentally friendly |
Dry etching |
